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Proceedings Paper

Mask Duplicator, Using Vacuum Contact
Author(s): Robert E. Lewis; Philip E. Chandler
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Paper Abstract

Two plates are placed in an exposure frame using a vacuum applied around the periphery while atmospheric pressure is maintained on the outside surfaces to force the plates into contact without trapped gas between. Integrated watt-second exposure is used with a controlled coherence source, allowing micron images.

Paper Details

Date Published: 1 March 1974
PDF: 3 pages
Proc. SPIE 0055, Technological Advances in Micro and Submicro Photofabrication Imagery, (1 March 1974); doi: 10.1117/12.954246
Show Author Affiliations
Robert E. Lewis, Timelapse Inc. (United States)
Philip E. Chandler, Teledyne Semiconductor (United States)

Published in SPIE Proceedings Vol. 0055:
Technological Advances in Micro and Submicro Photofabrication Imagery
William Converse; J. M. Graf, Editor(s)

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