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Proceedings Paper

Use Of Mask Making Technology In Producing High Quality, Low Cost Passive Optical Devices
Author(s): Arto Salin
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Paper Abstract

A concept of fabricating high quality optical passive components directly into mask blanks is introduced to simplify fabrication processes. The concept is demonstrated by fabricating ion-exchanged wave-guides, diffractive binary amplitude and phase coded holographic optical elements, Dammann gratings and diffraction-free beam elements.

Paper Details

Date Published: 25 July 1989
PDF: 13 pages
Proc. SPIE 1088, Optical/Laser Microlithography II, (25 July 1989); doi: 10.1117/12.953181
Show Author Affiliations
Arto Salin, Technical Research Centre of Finland (Finland)

Published in SPIE Proceedings Vol. 1088:
Optical/Laser Microlithography II
Burn Jeng Lin, Editor(s)

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