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Proceedings Paper

Lithographic Replication Of Compact Disk Structures
Author(s): Robert E. Revay; Philippe Briaud
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Paper Abstract

Conventional UV photolithography has been applied to the replication of glass compact disk structures for low cost fabrication of grooved glass substrates and ruggedized CD-ROM and CD-AUDIO disks. Unconventional pattern generation and replication strategies have been employed to produce high quality compact disk structures in soda-lime glass substrates.

Paper Details

Date Published: 25 July 1989
PDF: 12 pages
Proc. SPIE 1088, Optical/Laser Microlithography II, (25 July 1989); doi: 10.1117/12.953180
Show Author Affiliations
Robert E. Revay, Digipress (France)
Philippe Briaud, Digipress (France)

Published in SPIE Proceedings Vol. 1088:
Optical/Laser Microlithography II
Burn Jeng Lin, Editor(s)

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