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Proceedings Paper

Expert System for ASIC Imaging
Author(s): Shri N. Gupta; Khalil I. Arshak; Pearse McDonnell; Conor Boyce; Andrew Duggan
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Paper Abstract

With the developments in the techniques of artificial intelligence over the last few years, development of advisory, scheduling and similar class of problems has become very convenient using tools such as PROLOG. In this paper an expert system has been described which helps lithographers and process engineers in several ways. The methodology used is to model each work station according to its input, output and control parameters, combine these work stations in a logical sequence based on past experience and work out process schedule for a job. In addition, all the requirements vis-a-vis a particular job parameters are converted into decision rules. One example is the exposure time, develop time for a wafer with different feature sizes would be different. This expert system has been written in Turbo Prolog. By building up a large number of rules, one can tune the program to any facility and use it for as diverse applications as advisory help, trouble shooting etc. Leitner (1) has described an advisory expert system that is being used at National Semiconductor. This system is quite different from the one being reported in the present paper. The approach is quite different for one. There is stress on job flow and process for another.

Paper Details

Date Published: 25 July 1989
PDF: 5 pages
Proc. SPIE 1088, Optical/Laser Microlithography II, (25 July 1989); doi: 10.1117/12.953157
Show Author Affiliations
Shri N. Gupta, Seimconductor Devices Area (India)
Khalil I. Arshak, The National Institute of Higher Education (Ireland)
Pearse McDonnell, The National Institute of Higher Education (Ireland)
Conor Boyce, The National Institute of Higher Education (Ireland)
Andrew Duggan, The National Institute of Higher Education (Ireland)


Published in SPIE Proceedings Vol. 1088:
Optical/Laser Microlithography II
Burn Jeng Lin, Editor(s)

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