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Proceedings Paper

Development And Implementation Of A Laser-Induced Gold Deposition Technique For Repair Of Chromium Photomasks
Author(s): A. J. Serafino; R. J. Coyle; R. Borutta; A. Kestenbaum; G. L. Wolk; R. F. Doll
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Paper Abstract

A method for repairing transparent defects in photomasks has been developed. We discuss the experimental development and integration of the process into a commercial repair system. The defect repair process makes use of a laser to initiate thermal decomposition of a mod-ified commercially available gold metallorganic ink. The ink is locally decomposed with a laser over the defect thereby forming an adherent opaque gold repair pad over the defect. Rectangular repair pads from lum to 25um on a side can be deposited with a single laser exposure of 5 seconds.

Paper Details

Date Published: 25 July 1989
PDF: 9 pages
Proc. SPIE 1088, Optical/Laser Microlithography II, (25 July 1989); doi: 10.1117/12.953135
Show Author Affiliations
A. J. Serafino, AT&T Bell Laboratories (United States)
R. J. Coyle, AT&T Bell Laboratories (United States)
R. Borutta, AT&T Bell Laboratories (United States)
A. Kestenbaum, AT&T Bell Laboratories (United States)
G. L. Wolk, AT&T Bell Laboratories (United States)
R. F. Doll, AT&T Microelectronics (United States)


Published in SPIE Proceedings Vol. 1088:
Optical/Laser Microlithography II
Burn Jeng Lin, Editor(s)

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