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Proceedings Paper

A Machine Vision Architecture For Integrated Circuit Inspection
Author(s): Sal D' Agostino
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Paper Abstract

The paper presents a machine vision architecture which can address a wide range of machine vision applications in the manufacture of integrated circuits. A brief review of current applications and the reasons for the success of machine vision in the industry are also presented.

Paper Details

Date Published: 19 July 1989
PDF: 5 pages
Proc. SPIE 1087, Integrated Circuit Metrology, Inspection, and Process Control III, (19 July 1989); doi: 10.1117/12.953126
Show Author Affiliations
Sal D' Agostino, Computer Recognition Systems, Inc. (United States)


Published in SPIE Proceedings Vol. 1087:
Integrated Circuit Metrology, Inspection, and Process Control III
Kevin M. Monahan, Editor(s)

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