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Proceedings Paper

New Logic State Measurement Technique For The Electron Beam Tester
Author(s): A. Ito; K. Ookubo; T. Ishizuka; A. Muto; Y. Goto
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Paper Abstract

A multi-stroboscopic sampling (MSS) technique was devised for logic state measurement with the electron beam tester. Electron beam pulses are shot and secondary electron signals are sampled m times each repetition period of LSI operation. In addition, an interpolated s-curve (IPS) method was introduced in the MSS technique for quantitative voltage measurement. Using this technique, the measurement time required for 1024 logic states was reduced by 1/70 compared to the stroboscopic waveform measurement technique.

Paper Details

Date Published: 19 July 1989
PDF: 6 pages
Proc. SPIE 1087, Integrated Circuit Metrology, Inspection, and Process Control III, (19 July 1989); doi: 10.1117/12.953125
Show Author Affiliations
A. Ito, Fujitsu Laboratories Ltd., Atsugi (Japan)
K. Ookubo, Fujitsu Laboratories Ltd., Atsugi (Japan)
T. Ishizuka, Fujitsu Laboratories Ltd., Atsugi (Japan)
A. Muto, Fujitsu Ltd. (Japan)
Y. Goto, Fujitsu Laboratories Ltd., Atsugi (Japan)


Published in SPIE Proceedings Vol. 1087:
Integrated Circuit Metrology, Inspection, and Process Control III
Kevin M. Monahan, Editor(s)

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