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Proceedings Paper

Flatness Measurements Of Mounted Stage Mirrors
Author(s): Earl Ebert
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Paper Abstract

A method for measuring the flatness of mounted stage mirrors is presented. This is the first part of an effort to map stage mirrors mounted on an X-Y stage for the purpose of subtracting mirror flatness errors from distance measurements. The absolute surface flatness of an optical straight edge is determined using an interferometric three flat test. This calibrated mirror is measured against the stage mirror using a displacement measuring interferometer (DMI) system. A sample stage mirror is measured using a three flat test. The measured flatness is compared against that obtained using the DMI system. Results to date are presented. The accuracy of the system is currently limited by the accuracy of the three flat test, environmental factors, and second order rotation sensitivity of the interferometer.

Paper Details

Date Published: 19 July 1989
PDF: 10 pages
Proc. SPIE 1087, Integrated Circuit Metrology, Inspection, and Process Control III, (19 July 1989); doi: 10.1117/12.953114
Show Author Affiliations
Earl Ebert, Zygo Corporation (United States)


Published in SPIE Proceedings Vol. 1087:
Integrated Circuit Metrology, Inspection, and Process Control III
Kevin M. Monahan, Editor(s)

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