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Proceedings Paper

Picosecond Electron-Beam And Synchrotron Radiation Pulse Radiolysis For Studies On Electron-Beam And X-Ray Resists
Author(s): Yoichi Yoshida; Hiromi Shibata; Seiichi Tagawa; Masakazu Washio; Yoneho Tabata; Noriyuki Kouchi; Atsushi Ogata
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Paper Abstract

Picosecond electron-beam and synchrotron radiation pulse radiolysis are powerful method to study the reaction mechanism in irradiated electron beam and X-ray resists. The primary processes can be detected spectroscopically by using both pulse radiolysis systems. The details of the pulse radiolysis systems and a typical exsample of pulse radiolysis studies on the resists are introduced.

Paper Details

Date Published: 30 January 1989
PDF: 8 pages
Proc. SPIE 1086, Advances in Resist Technology and Processing VI, (30 January 1989); doi: 10.1117/12.953039
Show Author Affiliations
Yoichi Yoshida, University of Tokyo (Japan)
Hiromi Shibata, University of Tokyo (Japan)
Seiichi Tagawa, University of Tokyo (Japan)
Masakazu Washio, University of Tokyo (Japan)
Yoneho Tabata, University of Tokyo (Japan)
Noriyuki Kouchi, University of Tokyo (Japan)
Atsushi Ogata, National Laboratory for High Energy Physics (Japan)


Published in SPIE Proceedings Vol. 1086:
Advances in Resist Technology and Processing VI
Elsa Reichmanis, Editor(s)

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