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Proceedings Paper

Damage of Thermal Ink Jet Heaters by the Collapsing Vapor Bubble
Author(s): Michael P. O'Horo
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Paper Abstract

This paper discusses the damage to various passivation layers protecting Thermal Ink Jet heaters by the collapsing vapor bubble. The heater damage experiments were performed in either the printhead operational mode or or in an "open pool" configuration. The heaters described are located in a printhead channel and the passivation materials tested were Si02, Si3N4, TiW and Ta. Optical and SEM micrographs detailing the initial and later stages of cavitation damage have been taken and a comparison of heater damage/failure as a function of pulse number obtained. A discussion of the damage mechanism for the various passivation materials and the effects of bubble collapse and consequent cavitation will be presented.

Paper Details

Date Published: 6 July 1989
PDF: 10 pages
Proc. SPIE 1079, Hard Copy Output, (6 July 1989); doi: 10.1117/12.952791
Show Author Affiliations
Michael P. O'Horo, Xerox Corporation (United States)

Published in SPIE Proceedings Vol. 1079:
Hard Copy Output
Leo Beiser; Stephen L. Corsover; John M. Fleischer; Vsevolod S. Mihajlov; Ken-Ichi Shimazu, Editor(s)

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