Proceedings PaperDevelopment Of A Quartz Envelope Heater
|Format||Member Price||Non-Member Price|
|GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free.||Check Access|
The design of the Quartz Envelope Heater(QEH) has progressed dramatically. We originally developed the QEH for application in MOCVD and other gas phase epitaxial technology. The present design expands its capabilities to include ultra high vacuum applications and possibly to applications in which other ceramics or refractory metals are substituted for the outer quartz envelope. The heater consists of an evacuated quartz outer envelope which supports the sample and an internal resistance heater, which is below the sample and up against the, upper, inner surface of the quartz envelope. The configuration of the QEH enables the construction of a high temperature resistance heater with an inert outer surface exposed to the process environment and functional parts which are shielded from that environment. We include a detailed description of several older models along with a description the the newest version of the QEH to give insight into its design.