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Proceedings Paper

The Application Of Holospeckle-Shearing Interferometry To Displacement And Slope Analysis Of A Diaphragm Used In Silicon Pressure Sensors
Author(s): Liu Rongxun; Fang Jing; Wei Xiangyu; Qin Jichang; Shi Xiaodong
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Paper Abstract

A new technique combining holographic and speckle-shearing interferometry is applied. Using the technique, the displacement and the slope of diaphragms of the silicon pressure sensor have been measured separately from a single holospeckle-shearinggram. The experimental results are in good agreement with theoretical analysis.

Paper Details

Date Published: 16 July 1986
PDF: 5 pages
Proc. SPIE 0599, Optics in Engineering Measurement, (16 July 1986); doi: 10.1117/12.952375
Show Author Affiliations
Liu Rongxun, Beijing Institute of Chemical Technology (China)
Fang Jing, Beijing Institute of Chemical Technology (China)
Wei Xiangyu, Beijing Institute of Chemical Technology (China)
Qin Jichang, Beijing Institute of Chemical Technology (China)
Shi Xiaodong, Beijing Institute of Chemical Technology (China)


Published in SPIE Proceedings Vol. 0599:
Optics in Engineering Measurement
William F. Fagan, Editor(s)

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