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Proceedings Paper

The Role Of Unsteady Adiabatic Expansion In Laser Sputtering
Author(s): Roger Kelly
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Paper Abstract

When the number of monolayers sputtered per particle or per pulse is sufficiently small the emitted particles fly freely from the target surface. For yields comparable to 0.5 monolayer a limited number of gas-phase interactions occurs, leading to a Knudsen layer. As a result the particles develop moderate forward peaking ~cos4 θ) and begin to flow (Mach number ≈ 1). It is common, however, for yields to exceed 0.5 monolayer. We show that the resulting gas-phase interactions cause the Knudsen layer to evolve into an unsteady, adiabatic expansion which is formally like a gun which fires a finite charge into an infinite, one-dimensional barrel.

Paper Details

Date Published: 15 August 1989
PDF: 10 pages
Proc. SPIE 1056, Photochemistry in Thin Films, (15 August 1989); doi: 10.1117/12.951640
Show Author Affiliations
Roger Kelly, IBM Research Division (United States)


Published in SPIE Proceedings Vol. 1056:
Photochemistry in Thin Films
Thomas F. George, Editor(s)

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