Share Email Print
cover

Proceedings Paper

Optical, Electrical And Structural Properties Of Composite Films Made Of Si, Ge And C
Author(s): Philippe M. Fauchet; Ian H. Campbell
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

The properties of thin films made of alloys of Si, Ge, and C are investigated with Raman spectroscopy and other, mostly non-optical, techniques. The focus is on the relationship between structural, electronic. and optical properties. Three topics are investigated: the microcrystallinity in A thick (> 1000 Å) doped SiC films, the influence of the substrate on the properties of thin (< 1000 Å ) films, and possible heterogeneities in SiGe alloys. This study is the first step towards a better understanding of the relationship between the growth parameters and the electronic and optical properties that are useful in devices.

Paper Details

Date Published: 5 July 1989
PDF: 12 pages
Proc. SPIE 1055, Raman Scattering, Luminescence and Spectroscopic Instrumentation in Technology, (5 July 1989); doi: 10.1117/12.951590
Show Author Affiliations
Philippe M. Fauchet, Princeton University (United States)
Ian H. Campbell, Princeton University (United States)


Published in SPIE Proceedings Vol. 1055:
Raman Scattering, Luminescence and Spectroscopic Instrumentation in Technology
Fran Adar; James E. Griffiths; Jeremy M. Lerner, Editor(s)

© SPIE. Terms of Use
Back to Top