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Proceedings Paper

Analysis Of Diamond-Turned Optics Using Ellipsometry
Author(s): S. F. Nee.; H E Bennett; D L Decker; S. D Greene; A A. Ogloza
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Paper Abstract

Ellipsometric data for several diamond-turned samples were measured at a wavelength of 5µm and at multiple angles of incidence. These data were reduced by the least-square-fit programs for different models to obtain the corresponding best-fit parameters. Calculations from the three-dimensional anisotropic model for diamond-turned surfaces show that the ellipsometric parameters are not sensitive to the sample orientation for parallel depolarization factors smaller than 0.03. The best-fit results for different models are compared and discussed. A special model for two-dimensional symmetric rough layers can give rms errors as low as δψ ≤ 0.005° and δΔ ≤ 0.02°; its best-fit parameters agree with the profilometric rms roughness and rms slope.

Paper Details

Date Published: 11 July 1989
PDF: 12 pages
Proc. SPIE 1047, Mirrors and Windows for High Power/High Energy Laser Systems, (11 July 1989); doi: 10.1117/12.951364
Show Author Affiliations
S. F. Nee., Naval Weapons Center (United States)
H E Bennett, Naval Weapons Center (United States)
D L Decker, Naval Weapons Center (United States)
S. D Greene, Naval Weapons Center (United States)
A A. Ogloza, Naval Weapons Center (United States)


Published in SPIE Proceedings Vol. 1047:
Mirrors and Windows for High Power/High Energy Laser Systems
Claude A. Klein, Editor(s)

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