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Proceedings Paper

CVD Replication For Optics Applications
Author(s): Jitendra S. Goela; Raymond L Taylor
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Paper Abstract

A chemical vapor deposition process has been used to replicate shapes, patterns or highly reflective surfaces in infrared transmissive optical materials (ZnS, ZnSe) and mirror materials (Si, SiC) for a variety of applications, such as ZnS domes or meniscus lenses, ZnSe lens arrays for adaptive optics and low f-number Si/SiC mirrors for space optics. Conditions for achieving a high degree of replication are specified and replication results on several different substrate materials are presented. Techniques to obtain replication on those substrates which either are attacked in the CVD environment or whose thermal expansion coefficients are considerably different from that of the deposit are also discussed.

Paper Details

Date Published: 11 July 1989
PDF: 13 pages
Proc. SPIE 1047, Mirrors and Windows for High Power/High Energy Laser Systems, (11 July 1989); doi: 10.1117/12.951361
Show Author Affiliations
Jitendra S. Goela, Morton Thiokol Inc. (United States)
Raymond L Taylor, Morton Thiokol Inc (United States)

Published in SPIE Proceedings Vol. 1047:
Mirrors and Windows for High Power/High Energy Laser Systems
Claude A. Klein, Editor(s)

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