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Proceedings Paper

Excimer Lasers: Current Trends And Future Directions
Author(s): J. Reid; G. Bishop; S. Hastie; B. Norris; R. Weeks; E. Williams; T. Znotins
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Paper Abstract

This paper discusses the design and performance of a new excimer laser. The laser delivers output powers as high as 160 Watts on KrF with an efficiency of 4.5%, and has demonstrated gas lifetimes significantly better than any previously reported for high-power, commercial lasers. Details are given of an apparatus designed to determine the impurities which presently limit gas lifetime in excimer lasers.

Paper Details

Date Published: 1 June 1989
PDF: 7 pages
Proc. SPIE 1041, Metal Vapor Laser Technology and Applications, (1 June 1989); doi: 10.1117/12.951247
Show Author Affiliations
J. Reid, Lumonics Inc. (Canada)
G. Bishop, Lumonics Inc. (Canada)
S. Hastie, Lumonics Inc. (Canada)
B. Norris, Lumonics Inc. (Canada)
R. Weeks, Lumonics Inc. (Canada)
E. Williams, Lumonics Inc. (Canada)
T. Znotins, Lumonics Inc. (Canada)


Published in SPIE Proceedings Vol. 1041:
Metal Vapor Laser Technology and Applications
Jin J. Kim; Randy Kimball; P. Jeffrey Wisoff, Editor(s)

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