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Proceedings Paper

Optical Neasurements Of Diamond-Turned Surfaces
Author(s): Jacob Politch
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Paper Abstract

We describe here a system for measuring very accurately diamond-turned surfaces. This system is based on heterodyne interfercmetry and measures surface height variations with an accuracy of 4A, and the spatial resolution is 1 micrometer. Fran the measured data we have calculated the statistical properties of the surface - enabling us to identify the spatial frequencies caused by the vibrations of the diamond - turning machine and the measuring machine as well as the frequency of the grid.

Paper Details

Date Published: 5 July 1989
PDF: 5 pages
Proc. SPIE 1038, 6th Mtg in Israel on Optical Engineering, (5 July 1989); doi: 10.1117/12.951060
Show Author Affiliations
Jacob Politch, Technion I .I .T. (Israel)

Published in SPIE Proceedings Vol. 1038:
6th Mtg in Israel on Optical Engineering
Rami Finkler; Joseph Shamir, Editor(s)

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