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Proceedings Paper

A Surface Roughness Measurement In The Optical Workshop
Author(s): Allan Farber; Chaim Koshizky
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Paper Abstract

There is an increased demand for high quality optical components with minimal surface roughness for precision optical systems. As a result, it has become necessary to determine the surface quality using an accurate, quantitative and non-destructive measurement. This has led to considerable efforts to replace stylus methods with non-contact optical methods for surface texture measurements. Several non-contact optical methods have been tried and some of these have been implemented in commercial instruments. One of these methods utilizes the principle of differential interference con-trast. The system theory and implementation are described; results and calculations are presented for polished surfaces.

Paper Details

Date Published: 5 July 1989
PDF: 8 pages
Proc. SPIE 1038, 6th Mtg in Israel on Optical Engineering, (5 July 1989); doi: 10.1117/12.951059
Show Author Affiliations
Allan Farber, ELOP Electrooptics Industries Ltd. (Israel)
Chaim Koshizky, ELOP Electrooptics Industries Ltd. (Israel)

Published in SPIE Proceedings Vol. 1038:
6th Mtg in Israel on Optical Engineering
Rami Finkler; Joseph Shamir, Editor(s)

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