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Proceedings Paper

Focus Sensing Optical Profilometer
Author(s): Andrei Brunfeld; Joseph Shamir; Gregory Toker
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Paper Abstract

A high sensitivity focus sensing configuration is employed in the construction of an accurate optical profilometer. The system is analyzed theoretically and experimental investigation indicates a sensitivity better than 3nm with a linear dynamic range of 50μm. The deteriorating effects of finite apertures and various misalignments are also considered and taken into account for improved measuring procedures.

Paper Details

Date Published: 5 July 1989
PDF: 10 pages
Proc. SPIE 1038, 6th Mtg in Israel on Optical Engineering, (5 July 1989); doi: 10.1117/12.951051
Show Author Affiliations
Andrei Brunfeld, Data Processing Accessories, Ltd. (Israel)
Joseph Shamir, Israel Institute of Technology (Israel)
Gregory Toker, El-Op Electro-Optic Ind. (Israel)


Published in SPIE Proceedings Vol. 1038:
6th Mtg in Israel on Optical Engineering
Rami Finkler; Joseph Shamir, Editor(s)

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