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Proceedings Paper

Laser Absorption Spectroscopy: A Sensitive Gas Phase Processing Monitor
Author(s): Edward A. Whittaker; Chi Man Shum
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Paper Abstract

We present a summary of our efforts to develop a general purpose probe for plasma and other gas phase processing techniques based on laser absorption spectroscopy. This method offers several advantages for gas phase point monitoring, including line-of-sight optical access, small solid angle detection, absolute species concentration calibration and simple interpretation of spectra. Drawbacks to overcome include limited sensitivity due to laser technical noise and limited spectral coverage of high resolution tunable dye and diode lasers.

Paper Details

Date Published: 15 March 1989
PDF: 9 pages
Proc. SPIE 1037, Monitoring and Control of Plasma-Enhanced Processing of Semiconductors, (15 March 1989); doi: 10.1117/12.951014
Show Author Affiliations
Edward A. Whittaker, Stevens Institute of Technology (United States)
Chi Man Shum, Stevens Institute of Technology (United States)

Published in SPIE Proceedings Vol. 1037:
Monitoring and Control of Plasma-Enhanced Processing of Semiconductors
James E. Griffiths, Editor(s)

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