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Proceedings Paper

Current Accuracy Limits Of Dynamic Imaging Microellipsometry
Author(s): Ralph F. Cohn; James W. Wagner
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Paper Abstract

Dynamic Imaging Microellipsometry (DIM) is a fast, high resolution full-field imaging approach to ellipsometry. The testing of the second generation DIM system is described with measurement methodology and system accuracy covered. Relative and absolute errors are discussed separately with analyses of overall accuracy and individual error sources are detailed. Approaches for improving both relative and absolute accuracy are discussed.

Paper Details

Date Published: 1 May 1989
PDF: 10 pages
Proc. SPIE 1036, Precision Instrument Design, (1 May 1989); doi: 10.1117/12.950989
Show Author Affiliations
Ralph F. Cohn, The Johns Hopkins University/Applied Physics Laboratory (United States)
James W. Wagner, The Johns Hopkins University (United States)


Published in SPIE Proceedings Vol. 1036:
Precision Instrument Design
Thomas C. Bristow; Alson E. Hatheway, Editor(s)

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