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Proceedings Paper

Hologram Interferometer To Calibrate And Measure The Straightness In Micropositioning Equipment
Author(s): Martin Celaya; Ignacio Rizo; Efren Mercado
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Paper Abstract

A symmetric Inline Hologram Interferometer is designed to verify and measure the straigthness in a travel distance of 10mm., for a transversal movement from 2.μm up to 20.μm. In this type of hologram interferometer the light source illuminating the object, the object itself, the hologram and the optical viewing system are aligned. As an object a transmitting diffuser plate is used. The diffuser plate is placed on the translation stage that will be moving in the direction of the optical axis of the viewing system. In order to define the parameters of this instrument, an analysis of the visibility function and the optical path difference is made. Experimental results are presented.

Paper Details

Date Published: 1 May 1989
PDF: 8 pages
Proc. SPIE 1036, Precision Instrument Design, (1 May 1989); doi: 10.1117/12.950967
Show Author Affiliations
Martin Celaya, CICESE Research Center (United States)
Ignacio Rizo, CICESE Research Center (United States)
Efren Mercado, CICESE Research Center (United States)

Published in SPIE Proceedings Vol. 1036:
Precision Instrument Design
Thomas C. Bristow; Alson E. Hatheway, Editor(s)

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