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Proceedings Paper

Novel V-groove Structures On Silicon
Author(s): S. Sriram
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Paper Abstract

We report the fabrication of novel V-groove structures by etching silicon twice in an anisotropic etch solution. This technique is capable of yielding micron size patterns from large patterns. For example, we have been able to reduce a 7 μm pattern down to 1 μm. This technique finds useful application in novel diffracting grating structures.

Paper Details

Date Published: 11 September 1985
PDF: 7 pages
Proc. SPIE 0578, Integrated Optical Circuit Engineering II, (11 September 1985); doi: 10.1117/12.950752
Show Author Affiliations
S. Sriram, Allied Amphenol Products (United States)

Published in SPIE Proceedings Vol. 0578:
Integrated Optical Circuit Engineering II
Sriram Sriram, Editor(s)

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