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Proceedings Paper

Optical and electrical properties of In[sub]2[/sub]0[sub]2[/sub]/In, In[sub]2[/sub]0[sub]3[/sub]/Sn (ITO), In[sub]2[/sub]0[sub]3[/sub]/Cd
Author(s): Chen Lixin; Zhuang Guorung; Mei Liangom
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Paper Abstract

The high quality In203/Sn (ITO), In203 /In, In203/Cd have been deposited on quatz glass substrates, thermal pressed ZnS and Mgpi, substretes.Then we made transmission measurement in a rather wide range of spectrum which extends from ultraviolet through visible to middle infrared (200A--25μm), and made Hall coefficient measurement, film thickness measurement, energy spectrum analysis, X-ray diffraction, Electrolytic electroreflectance spectra measu-rement, etc. The result of which are discussed based on preliminary analysis and comparison. The square resistance of the film is in the proximity of few tx to fey ten XL. Its optical transmission in the visiblei range as high as 90% and risistivity of 101--2X104.11.-cm, free carriers concentration of 101-1041 col, free cariers mobility of 10-90cm/V.Sec are typically observed.

Paper Details

Date Published: 23 February 1985
PDF: 6 pages
Proc. SPIE 0572, Infrared Technology XI, (23 February 1985); doi: 10.1117/12.950684
Show Author Affiliations
Chen Lixin, Infrared and Remote Sensing Research Lab. (China)
Zhuang Guorung, Chang Zhou Automatic Institute of Coal Science Academy Coal Industrial Minstry (China)
Mei Liangom, Department of Physics Shandong University (China)

Published in SPIE Proceedings Vol. 0572:
Infrared Technology XI
Richard A. Mollicone; Irving J. Spiro, Editor(s)

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