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Proceedings Paper

Thin-Film Compounds Formation With Pulsed Laser-Plasma Fluxes
Author(s): S. M. Metev; M . S. Sendova
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Paper Abstract

In the paper some of the specific features of the pulsed laser-plasma deposition method are discussed, which are important for the stoichiometric deposition of compound materials of determined thickness and structure. On the bases of some experimental investigations the optimum conditions for synthesis of some polycomponent materials are characterized.

Paper Details

Date Published: 18 May 1989
PDF: 4 pages
Proc. SPIE 1033, Trends in Quantum Electronics, (18 May 1989); doi: 10.1117/12.950626
Show Author Affiliations
S. M. Metev, Sofia University (Bulgaria)
M . S. Sendova, Sofia University (Bulgaria)


Published in SPIE Proceedings Vol. 1033:
Trends in Quantum Electronics
Ioan Ursu, Editor(s)

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