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Proceedings Paper

Metal-Silicide Formation With Laser Pulses
Author(s): A. Luches; G Leggieri; E. D'Anna
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Paper Abstract

The most relevant results obtained in the field of the synthesis of metal suicides with pulsed lasers in the nanosecond regime are reviewed. Particular emphasis is given to the results obtained in our laboratories. Formation of stable and metastable compounds, their structure and the surface morphology of the irradiated materials are discussed. The reaction kinetics is investigated through a comparison of the experimental results with the temperatures of the irradiated samples, calculated by solving the heat diffusion equation.

Paper Details

Date Published: 18 May 1989
PDF: 19 pages
Proc. SPIE 1033, Trends in Quantum Electronics, (18 May 1989); doi: 10.1117/12.950625
Show Author Affiliations
A. Luches, Universita' di Lecce (Italy)
G Leggieri, Universita' di Lecce (Italy)
E. D'Anna, Universita' di Lecce (Italy)

Published in SPIE Proceedings Vol. 1033:
Trends in Quantum Electronics
Ioan Ursu, Editor(s)

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