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Proceedings Paper

Modification Of Surfaces Under The Action Of UV Laser Radiation
Author(s): V. P. Ageev; V. I . Konov; A. V. Kuzmichev
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Paper Abstract

New results on excimer laser application for fine surface structurization are presented. There are considered peculiarities of the UV-photon induced processes of:(i) chemical deposition of carbon and silicon carbide films from CC14 and CH3SiC13vapour precursors onto dielectric substrates,(ii) chemical etching of c-Si in CC14 vapour environment, and (iii) microstructures production by decomposition of organo-metallic (metal resinate) films. The fundamental role of superposition of thermal and photo-stimulated processes is also discussed.

Paper Details

Date Published: 18 May 1989
PDF: 10 pages
Proc. SPIE 1033, Trends in Quantum Electronics, (18 May 1989); doi: 10.1117/12.950618
Show Author Affiliations
V. P. Ageev, Institute of General Physics of USSR Academy of Sciences (USSR)
V. I . Konov, Institute of General Physics of USSR Academy of Sciences (USSR)
A. V. Kuzmichev, Institute of General Physics of USSR Academy of Sciences (USSR)


Published in SPIE Proceedings Vol. 1033:
Trends in Quantum Electronics
Ioan Ursu, Editor(s)

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