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Proceedings Paper

A Diagnostic System For An Excimer Laser Beam
Author(s): T. Yagi; Y. Matsumi; K. Ohta; H. Saito; M. Obara; T. Fujioka
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Paper Abstract

An imaging system with a two dimensional photo diode array was developed for the excimer laser beam diagnostics. It is featured with a fast frame rate, high spacial resolution, and responsibity at the uv wave length. With a simple optical set up for the imager, we measured a near and a far field pattern simultaneously and the spectral band width of the consecutive KrF excimer laser pulses at 250Hz. These measurements shows our imaging system possesses enough spacial resolution for the beam pattern and spectral measurements.

Paper Details

Date Published: 20 June 1989
PDF: 7 pages
Proc. SPIE 1031, 7th Intl Symp on Gas Flow and Chemical Lasers, (20 June 1989); doi: 10.1117/12.950547
Show Author Affiliations
T. Yagi, Industrial Research Institute (Japan)
Y. Matsumi, Hokkaido University (Japan)
K. Ohta, Keio University (Japan)
H. Saito, Industrial Research Institute (Japan)
M. Obara, Keio University (Japan)
T. Fujioka, Industrial Research Institute (Japan)


Published in SPIE Proceedings Vol. 1031:
7th Intl Symp on Gas Flow and Chemical Lasers
Dieter Schuoecker, Editor(s)

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