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Proceedings Paper

Advances In Excimer Laser Materials Processing: An Update
Author(s): G. Darcy Poulin; Peter A. Eisele; Thomas A. Znotins
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Paper Abstract

Excimer lasers are finding increasing use in the area of laser materials processing. Of particular importance is the fact that excimers can remove material through ablation rather than by any purely thermal mechanism such as those associated with YAG or CO2 processing. This paper reviews briefly the basic mechanisms associated with excimer laser ablation and presents several examples of practical applications of this new technique.

Paper Details

Date Published: 26 April 1989
PDF: 6 pages
Proc. SPIE 1023, Excimer Lasers and Applications, (26 April 1989); doi: 10.1117/12.950150
Show Author Affiliations
G. Darcy Poulin, Lumonics Inc. (Canada)
Peter A. Eisele, Lumonics Inc. (Canada)
Thomas A. Znotins, Lumonics Inc. (Canada)

Published in SPIE Proceedings Vol. 1023:
Excimer Lasers and Applications
Dirk Basting, Editor(s)

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