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Proceedings Paper

Precision Machining Of Coating Layers By Irradiation With A High Pulse Energy Excimer Laser
Author(s): K. J. Schmatjko; H. Durchholz; G. Endres
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Paper Abstract

The structured removal of coatings by excimer laser irradiation was investigated for different coating/substrate systems. High structure quality and pm dimensions were attained for polymer coatings. Coating materials which melt under irradiation, show deterioration by melt flow, reactive or alloying action with the substrate, or limited wettability, which makes cleaning difficult. But in most cases the requirement of total removal can be met by the reduction of structure quality or machining speed.

Paper Details

Date Published: 26 April 1989
PDF: 8 pages
Proc. SPIE 1023, Excimer Lasers and Applications, (26 April 1989); doi: 10.1117/12.950149
Show Author Affiliations
K. J. Schmatjko, Siemens AG (Fed. Rep. Germany)
H. Durchholz, Siemens AG (Fed. Rep. Germany)
G. Endres, Siemens AG (Fed. Rep. Germany)


Published in SPIE Proceedings Vol. 1023:
Excimer Lasers and Applications
Dirk Basting, Editor(s)

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