Proceedings PaperExcimer Laser Based Machining Of Amorphous Metals
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Although removal processes with excimer-laser radiation are especially adapted for organic materials, enabling nonthermal photochemical processes due to high photon energies and single or multiphoton interactions, excimer-laser seem to be suited for processing metals as well, interacting thermal. Shortest pulse durations with high fluence cause a minimized thermal input by mainly vaporizing the irradiated material and less heat conduction into the solid. The subject of this paper is to work out the removal process of amorphous metals with excimer-laser radiation. The effect of beam parameters and thermal influence on removal process and machined workpiece and estimations for capability of excimer lasers at such applications will be discussed.