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Proceedings Paper

Excimer Lasers For Material Processing: Results And Industrial Applications
Author(s): H.-J. Kahlert; U. Sowada; D. Basting
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Paper Abstract

Excimer laser material processing of technical parts leads to results which, in many cases, differ strongly from previously known effects. This paper is a review on processing of metals, plastics, glass, ceramics, and compound materials. Since the effect of radiation is determined by beam parameters, beam handling will be described as well. Starting with the beam properties of interest, the technique and results of excimer laser processing will be summarized.

Paper Details

Date Published: 26 April 1989
PDF: 8 pages
Proc. SPIE 1023, Excimer Lasers and Applications, (26 April 1989); doi: 10.1117/12.950146
Show Author Affiliations
H.-J. Kahlert, Lambda Physik GmbH (FRG)
U. Sowada, Lambda Physik GmbH (FRG)
D. Basting, Lambda Physik GmbH (FRG)


Published in SPIE Proceedings Vol. 1023:
Excimer Lasers and Applications
Dirk Basting, Editor(s)

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