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Proceedings Paper

Numbers Of Merit In Excimer Laser Reliability Analysis
Author(s): Lindsay Austin; Dirk Basting; Hans-Jurgen Kahlert; Ulrich Rebhan; Wolfgang Muckenheim
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Paper Abstract

Recent results confirm new advances in XeC1 excimer laser discharge design have achieved major milestones in reliability - 1010 pulses without replacing the thyratron, electrodes, capacitors or power supply. Other data on standard KrF excimer lasers allow statistical analysis of numbers of merit, including MTBF and maintenance intervals. Projections are made of operating costs and maintenance for both continuous operation and low duty cycle of two different size lasers with all major gases: XeCl, KrF and ArF.

Paper Details

Date Published: 26 April 1989
PDF: 8 pages
Proc. SPIE 1023, Excimer Lasers and Applications, (26 April 1989); doi: 10.1117/12.950137
Show Author Affiliations
Lindsay Austin, Lambda Physik Inc. (United States)
Dirk Basting, Lambda Physik GmbH (FRG)
Hans-Jurgen Kahlert, Lambda Physik GmbH (FRG)
Ulrich Rebhan, Lambda Physik GmbH (FRG)
Wolfgang Muckenheim, Lambda Physik GmbH (FRG)

Published in SPIE Proceedings Vol. 1023:
Excimer Lasers and Applications
Dirk Basting, Editor(s)

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