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Proceedings Paper

Advanced Control System For Excimer Lasers
Author(s): H. Rosenkranz; D. Basting; U. Rebhan; W. Muckenheim
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Paper Abstract

Modern excimer lasers comprise feedback systems to stabilize the output at preselected values. The shortcomings of the conventional systems comprising a single microprocessor and a lot of signal and command lines are (i) low data transfer rate and (ii) sensitivity against electromagnetic interference which is always present within discharge-excited excimer lasers. These shortcomings can be removed by utilizing a local-area network (LAN) with microprocessors at each actuator and detector, which communicate by a single fiberoptic ring line.

Paper Details

Date Published: 26 April 1989
PDF: 4 pages
Proc. SPIE 1023, Excimer Lasers and Applications, (26 April 1989); doi: 10.1117/12.950135
Show Author Affiliations
H. Rosenkranz, Lambda Physik (FRG)
D. Basting, Lambda Physik (FRG)
U. Rebhan, Lambda Physik (FRG)
W. Muckenheim, Lambda Physik (FRG)

Published in SPIE Proceedings Vol. 1023:
Excimer Lasers and Applications
Dirk Basting, Editor(s)

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