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Proceedings Paper

ArF* And Ar[sub]2[/sub]F* Excimer Systems
Author(s): Peter J. Peters; Bert M. Bastiaens; Umberto del Bello; Wim J. Witteman
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Paper Abstract

The effect of the addition of Ne as a buffer gas to an Ar/F2 laser gas mixture was studied in two different systems. With the largest device the total output energy was optimized, in the smaller system the pressure dependency of the addition of the Ne was studied. Futhermore the fluorescence signals of ArF* and Ar2F* were recorded as a function of the excitation length and pumping intensity.

Paper Details

Date Published: 26 April 1989
PDF: 5 pages
Proc. SPIE 1023, Excimer Lasers and Applications, (26 April 1989); doi: 10.1117/12.950128
Show Author Affiliations
Peter J. Peters, University of Twente (The Netherlands)
Bert M. Bastiaens, University of Twente (The Netherlands)
Umberto del Bello, University of Twente (The Netherlands)
Wim J. Witteman, University of Twente (The Netherlands)


Published in SPIE Proceedings Vol. 1023:
Excimer Lasers and Applications
Dirk Basting, Editor(s)

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