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Proceedings Paper

High Power Excimer Laser: First Results
Author(s): P. Oesterlin; W. MUckenheim; D. Basting
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Paper Abstract

Excimer lasers emitting more than 200 W output power are not commercially available. A significant increase requires new technological efforts with respect to both the gas circulation and the discharge system. A due research project has yielded a laser which emits 0.5 kW at 308 nm when being UV preionized and operated at a repetition rate of 300 Hz. The laser, which is capable of operating at 500 Hz, can be equipped with an X-ray preionization module. After completing this project 1 kW output power will be available.

Paper Details

Date Published: 26 April 1989
PDF: 4 pages
Proc. SPIE 1023, Excimer Lasers and Applications, (26 April 1989); doi: 10.1117/12.950125
Show Author Affiliations
P. Oesterlin, Lambda Physik (FRG)
W. MUckenheim, Lambda Physik (FRG)
D. Basting, Lambda Physik (FRG)


Published in SPIE Proceedings Vol. 1023:
Excimer Lasers and Applications
Dirk Basting, Editor(s)

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