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Proceedings Paper

Excimer Lasers With Large Discharge Cross Section
Author(s): H.-J. Cirkel; R. Baumgartl; W. Bette; V. Bruckner; D. Friede; U. Kempfer; R. Muller; M. Schmutzler
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Paper Abstract

The operating characteristics of a pulse forming network (PFN) for large volume excimer lasers comprising paralleled waterline capacitors are described. The PFN uses different kinds of switches such as thyratrons and a multichannel pseudo spark switch. The X-ray pre-ionizer is composed of a low ohmic pulse generator and an X-ray tube with a hollow cathode. To investigate the evolution and damping of gas inhomogenities, caused by the short laser discharge, optical interferometry with high time resolution is used. Results and conditions are presented for operating the excimer laser at different wavelengths with high energy output.

Paper Details

Date Published: 26 April 1989
PDF: 8 pages
Proc. SPIE 1023, Excimer Lasers and Applications, (26 April 1989); doi: 10.1117/12.950123
Show Author Affiliations
H.-J. Cirkel, Siemens AG/UB KWU (Fed. Rep. Germany)
R. Baumgartl, Siemens AG/UB KWU (Fed. Rep. Germany)
W. Bette, Siemens AG/UB KWU (Fed. Rep. Germany)
V. Bruckner, Siemens AG/UB KWU (Fed. Rep. Germany)
D. Friede, Siemens AG/UB KWU (Fed. Rep. Germany)
U. Kempfer, Siemens AG/UB KWU (Fed. Rep. Germany)
R. Muller, Siemens AG/UB KWU (Fed. Rep. Germany)
M. Schmutzler, Siemens AG/UB KWU (Fed. Rep. Germany)


Published in SPIE Proceedings Vol. 1023:
Excimer Lasers and Applications
Dirk Basting, Editor(s)

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