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Proceedings Paper

High Repetition Rate High Power Excimer Lasers
Author(s): Hubertus M. von Bergmann; Gordon L. Bredenkamp; Piet H. Swart
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Paper Abstract

We report on the development of high repetition rate, high average power excimer laser systems with projected repetition rates of several kHz and multi kilowatt outputs. An optimized system concept has been derived by theoretically and experimentally comparing the various system options. Preliminary results are presented for a compact spark-preionized KrF and XeC1 excimer laser system operating at repetition rates of up to 800 Hz and being capable of average output powers of more than 300 W. The laser is excited by a single-thyratron switched LC-inversion circuit, utilizing single or double stage pulse compression.

Paper Details

Date Published: 26 April 1989
PDF: 5 pages
Proc. SPIE 1023, Excimer Lasers and Applications, (26 April 1989); doi: 10.1117/12.950120
Show Author Affiliations
Hubertus M. von Bergmann, Rand Afrikaans Univ. (South Africa)
Gordon L. Bredenkamp, Rand Afrikaans Univ. (South Africa)
Piet H. Swart, Rand Afrikaans Univ. (South Africa)


Published in SPIE Proceedings Vol. 1023:
Excimer Lasers and Applications
Dirk Basting, Editor(s)

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