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Proceedings Paper

ArF Excimer Laser Ablation Of Mercury Cadmium Telluride Semiconductor (MCT)
Author(s): Philippe Gaucherel; Alain Azema; Jean Botineau; Jean-Claude Roustan
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Paper Abstract

A UV photoablation method with an ArF excimer laser has been experimented on Mercury Cadmium Telluride alloys. We have investigated etching rate, surface quality and surface composition under several experimental conditions. We have also obtained linear photoablated grooves by sample scanning which could be a first step to convert planar into strip waveguides.

Paper Details

Date Published: 10 April 1989
PDF: 6 pages
Proc. SPIE 1022, Laser Assisted Processing, (10 April 1989); doi: 10.1117/12.950113
Show Author Affiliations
Philippe Gaucherel, Laboratoire de Physique de la Matiere Condensee (France)
Alain Azema, Laboratoire de Physique de la Matiere Condensee (France)
Jean Botineau, Laboratoire de Physique de la Matiere Condensee (France)
Jean-Claude Roustan, Laboratoire de Physique de la Matiere Condensee (France)


Published in SPIE Proceedings Vol. 1022:
Laser Assisted Processing
Lucien Diego Laude; Gerhard K. Rauscher, Editor(s)

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