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Proceedings Paper

Pyrolytic Deposition Of SiO[sub]2[/sub] With CO[sub]2[/sub] Laser
Author(s): M. D. Fernandez; P. Gonzalez; B. Leon; M. Perez-Amor
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Paper Abstract

Preliminary results obtained by laser-induced chemical vapor deposition of silicon dioxide films are reported. Films have been deposited on a silicon substrate using a CO2 laser.

Paper Details

Date Published: 10 April 1989
PDF: 4 pages
Proc. SPIE 1022, Laser Assisted Processing, (10 April 1989); doi: 10.1117/12.950109
Show Author Affiliations
M. D. Fernandez, Universidad de Santiago (Spain)
P. Gonzalez, Universidad de Santiago (Spain)
B. Leon, Universidad de Santiago (Spain)
M. Perez-Amor, Universidad de Santiago (Spain)

Published in SPIE Proceedings Vol. 1022:
Laser Assisted Processing
Lucien Diego Laude; Gerhard K. Rauscher, Editor(s)

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