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Proceedings Paper

Hydrogenated Amorphous Silicon Films Deposited By CO[sub]2[/sub] Laser Induced Decomposition Of Silane
Author(s): P. Gonzalez; M. D. Fernandez; B. Leon; M. Perez-Amor
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Paper Abstract

First results obtained by laser-induced chemical vapour deposition of hydrogenated amorphous silicon films are reported. Processing conditions are determined for production of films suitable to be used in photovoltaic applications.

Paper Details

Date Published: 10 April 1989
PDF: 3 pages
Proc. SPIE 1022, Laser Assisted Processing, (10 April 1989); doi: 10.1117/12.950108
Show Author Affiliations
P. Gonzalez, Universidad de Santiago de Compostela (Spain)
M. D. Fernandez, Universidad de Santiago de Compostela (Spain)
B. Leon, Universidad de Santiago de Compostela (Spain)
M. Perez-Amor, Universidad de Santiago de Compostela (Spain)

Published in SPIE Proceedings Vol. 1022:
Laser Assisted Processing
Lucien Diego Laude; Gerhard K. Rauscher, Editor(s)

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