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Proceedings Paper

Laser-Induced Metal Deposition From The Liquid Phase
Author(s): Andre M. T. P. van der Putten; Jan W. M. Jacobs; Jan M. G. Rikken; Kees G. C. de Kort
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Paper Abstract

A process is described to selectively deposit metal tracks from ammoniacal metal salt solutions. The substrate is locally heated using a 5W CW Ar+ laser. At the irradiated area, the NH3 is thermally decomposed. The liberated electrons reduce the metal ions to the corresponding metal. Simultaneously, the focused laser beam induces local boiling phenomena, leading to a stationary jet flow with extremely efficient replenishment of reactants and correspondingly high deposition rates. In this way, Pd tracks 20 μm wide and 10 μm high have been grown at a lateral rate of 500μm s-1. At present, the process is used to rewire integrated circuits, to facilitate testing and failure analysis.

Paper Details

Date Published: 10 April 1989
PDF: 6 pages
Proc. SPIE 1022, Laser Assisted Processing, (10 April 1989); doi: 10.1117/12.950103
Show Author Affiliations
Andre M. T. P. van der Putten, Philips Research Laboratories (The Netherlands)
Jan W. M. Jacobs, Philips Research Laboratories (The Netherlands)
Jan M. G. Rikken, Philips Research Laboratories (The Netherlands)
Kees G. C. de Kort, Philips Research Laboratories (The Netherlands)


Published in SPIE Proceedings Vol. 1022:
Laser Assisted Processing
Lucien Diego Laude; Gerhard K. Rauscher, Editor(s)

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