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Proceedings Paper

High-Speed Ellipsometer For Thin-Film Deposition Monitoring
Author(s): W. H. Southwell; W. J. Gunning
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Paper Abstract

A conceptual design for a no-moving-parts ellipsometer with a calibration procedure to remove effects of imperfect components and detector sensitivity differences is described. The device is particularly useful for infrared (IR) coating monitoring, where high deposition rates are used and where detectors may be polarization-sensitive. A calibration scheme that uses only linearly polarized beams and no retardation components has been devised.

Paper Details

Date Published: 27 February 1989
PDF: 6 pages
Proc. SPIE 1019, Thin Film Technologies III, (27 February 1989); doi: 10.1117/12.950021
Show Author Affiliations
W. H. Southwell, Rockwell International Science Center (United States)
W. J. Gunning, Rockwell International Science Center (United States)

Published in SPIE Proceedings Vol. 1019:
Thin Film Technologies III
Karl H. Guenther; Hans K. Pulker, Editor(s)

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