Critical environmental conditions require optical components with enhanced surface characteristics in respect of mechanical and chemical damage. To this purpose, protective films that improve substrate cl-ia.:acte,-fistics without detriment of optical properties are used. In this paper a comparison between he properties of Y 0 and a-C:H as protective coatings in the 8-12 um is reported. The Y 0 films have been deposited by r.f. Sputtering and a-C:H by Dual ION Beam Sputtering on glass and germanium substrate. The measurements of refractive index and extinction coefficient of these films in the infrared wavelength range are presented. Moreover, the ultra-microhardness and adhesion of deposited films are compared.

Date Published: 27 February 1989
PDF: 5 pages
Proc. SPIE 1019, Thin Film Technologies III, (27 February 1989); doi: 10.1117/12.950017

Published in SPIE Proceedings Vol. 1019:
Thin Film Technologies III
Karl H. Guenther; Hans K. Pulker, Editor(s)