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Proceedings Paper

Practical Aspects Of Pumping Systems For Optical Coating
Author(s): P. R. Denton; D. Boyarsky; A. Musset; I. C. Stevenson
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Paper Abstract

The objective of this paper is to discuss practical aspects of pumping systems typically used in precision optical coating systems. The paper is directed at thin film technologists, engineers and technicians and will only touch lightly on vacuum pumping theory. We shall provide data from actual production systems that can be a useful guide to purchasers of optical coating systems on how pumping systems should be configured. We will also attempt to identify common problems relating to specific pumps and processes that users should anticipate and avoid.

Paper Details

Date Published: 27 February 1989
PDF: 12 pages
Proc. SPIE 1019, Thin Film Technologies III, (27 February 1989); doi: 10.1117/12.950012
Show Author Affiliations
P. R. Denton, Denton Vacuum, Inc. (United States)
D. Boyarsky, Denton Vacuum, Inc. (United States)
A. Musset, Denton Vacuum, Inc. (United States)
I. C. Stevenson, Denton Vacuum, Inc. (United States)

Published in SPIE Proceedings Vol. 1019:
Thin Film Technologies III
Karl H. Guenther; Hans K. Pulker, Editor(s)

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