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Proceedings Paper

Uncertainty Of Multiple Determination Of Optical Constants And Layer Thicknesses Of Thin Films Case Of TiO2/Ag/TiO2 Coating On Glass
Author(s): Valery A. Koss; Abraham Belkind; David E. Aspnes; Lawrence Nazar; Jerzy A. Dobrowolski; Fang C. Ho; Kazem Memarzadeh; John A. Woollam; F. Bernoux; Jean P. Piel
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Paper Abstract

Multiply determined thicknesses of constituent layers and optical constants of Ag layer in Tio2/Ag/TiO2 coatings on glass are compared using regions of uncertainties for evaluated parameters. The measurements were done using spectroscopic ellipsometry and spectrophotometry. The regions of uncertainty for each evaluated parameter were obtained using a separately determined accuracy of measurements. It is shown that the actual structure of the coating is more complex than a three or five layer model.

Paper Details

Date Published: 6 March 1989
PDF: 8 pages
Proc. SPIE 1016, Optical Materials Technology for Energy Efficiency and Solar Energy Conversion VII, (6 March 1989); doi: 10.1117/12.949932
Show Author Affiliations
Valery A. Koss, The BOC Inc. (United States)
Abraham Belkind, The BOC Inc. (United States)
David E. Aspnes, Bell Communication's Research (United States)
Lawrence Nazar, Bell Communications Research (United States)
Jerzy A. Dobrowolski, National Research Council (Canada)
Fang C. Ho, National Research Council (Canada)
Kazem Memarzadeh, University of Nebraska-Lincoln (United States)
John A. Woollam, University of Nebraska-Lincoln (United States)
F. Bernoux, SOPRA (France)
Jean P. Piel, SOPRA (France)

Published in SPIE Proceedings Vol. 1016:
Optical Materials Technology for Energy Efficiency and Solar Energy Conversion VII
Claes-Goeran Granqvist; Carl M. Lampert, Editor(s)

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