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Proceedings Paper

Measuring Optically Induced Currents With The Laser Scan Microscope
Author(s): Hajo Hinkelmann
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Paper Abstract

A laser induced photoresponse method is used for visualizing electronic properties of semiconductor materials and operational ICs. There are clear advantages compared to electron beam probing. By modulation of the laser light the method can be extended to internal logic analysis.

Paper Details

Date Published: 2 January 1986
PDF: 5 pages
Proc. SPIE 0565, Micron and Submicron Integrated Circuit Metrology, (2 January 1986); doi: 10.1117/12.949736
Show Author Affiliations
Hajo Hinkelmann, Carl Zeiss, Inc. (United States)


Published in SPIE Proceedings Vol. 0565:
Micron and Submicron Integrated Circuit Metrology
Kevin M. Monahan, Editor(s)

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