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Proceedings Paper

A Phase Sensitive Scanning Optical Microscope
Author(s): P. C. D. Hobbs; R. L. Jungerrran; G. S. Kino
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Paper Abstract

We describe a new type of electronically-scanned confocal optical microscope which is very well suited to surface metrology. A laser beam incident on a wideband Te02 Bragg cell produces both a stationary beam which is used as a local phase reference and a scanned beam which is frequency-shifted; these are used in an AC interferometer. The system produces an RF output whose amplitude is that of the scanned beam, and whose phase is the optical phase difference of the two beams. Optical phase and amplitude can then be measured separately with standard RF techniques. Phase accuracy is about 10 . Transverse edge resolution (10%-90%) of 230 nm has been obtained (with λ = 514.5 nm) , which is in good agreement with the prediction of the simple theory. The data has been deconvolved to enhance the edge resolution, resulting in an ultimate resolution of 130 nm at the expense of introducing ripple into the edge response.

Paper Details

Date Published: 2 January 1986
PDF: 10 pages
Proc. SPIE 0565, Micron and Submicron Integrated Circuit Metrology, (2 January 1986); doi: 10.1117/12.949734
Show Author Affiliations
P. C. D. Hobbs, Stanford University (United States)
R. L. Jungerrran, Stanford University (United States)
G. S. Kino, Stanford University (United States)

Published in SPIE Proceedings Vol. 0565:
Micron and Submicron Integrated Circuit Metrology
Kevin M. Monahan, Editor(s)

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