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Proceedings Paper

SMART SET - An Integrated Approach to Stepper Set-Up and Calibration
Author(s): Raul V. Tan; Christopher P. Ausschnitt
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Paper Abstract

We report here the development of SMART SET', an expert system designed to complement the GCA DSW Wafer Stepperg, such that closed loop feedback for stepper set-up and calibration is realized. In particular, SMART SET' enables the user to monitor and optimize overlay and utilization performance. Measurements are obtained directly from the automated local alignment and history file systems of the stepper. An analysis package which embodies the expertise of stepper applications engineers provides rapid feedback of the system corrections required to sustain optimum stepper performance.

Paper Details

Date Published: 2 January 1986
PDF: 11 pages
Proc. SPIE 0565, Micron and Submicron Integrated Circuit Metrology, (2 January 1986); doi: 10.1117/12.949731
Show Author Affiliations
Raul V. Tan, GCA Corporation (United States)
Christopher P. Ausschnitt, GCA Corporation (United States)


Published in SPIE Proceedings Vol. 0565:
Micron and Submicron Integrated Circuit Metrology
Kevin M. Monahan, Editor(s)

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